EP tube

Overview

With the advancement of ever-changing digital technologies in industries such as microelectronics and sterile biopharmaceutical, the market demand is expanding day by day.

For example, in the semiconductor industry, the demand for chips with higher functions and storage capabilities is also growing. More and more manufacturers are starting to put into production, which requires a trusted means to deliver UHP gases to etching, lithography and other important equipment. These UOP rely on pollution-free UHP gases, and any impurities can affect the performance of transistors, diodes and integrated circuits at nano – and micron sizes, resulting in high costs if the chip or wafer is damaged. There are two factors that play an important role in the integrity of UHP gases in semiconductor factories: trusted surface protection of pipes and tubes.

Advantages of EP tube

    Electrolytic polishing tube surface can ensure that the ultra-pure gas does not change the chemical composition, this is because the surface through an electrochemical process, under the action of direct current, the metal through the electrolyte, can remove 10 to 15 μm of manufactured particles, thereby reducing the surface roughness, forming a smooth surface. Because this process is carried out by electric current, the polishing can be done precisely to the specifications you require.
    Its advantages include:

  • ◎ Does not increase the number of gas particles to prevent pollution
  • ◎ Anti-corrosion
  • ◎ High chemical purity, good chemical passivation
  • ◎ Reduces friction and wear

Material

TP316L

Technical norms

ASTM A213
ASTM A269
ASTM A270

Application

  • ◎Semiconductor
  • ◎Microelectronic technology

Typical applications

Tubes for gas line of N2, PN2, H2, PH2, Ar, He, special gas, etc.

Sizes, tolerance and surface roughness

Table1

OD Inch OD mm OD tolerance WT mm WT tolerance Surface finishing
1/8” 3.18 ±0.5% or ±0.10mm 0.75 ±12.5% Ra≤0.10μm
Rmax≤0.30μm
1/4” 6.35 ±0.5% or ±0.10mm 0.89, 1.0, 1.24 ±12.5%
3/8” 9.53 ±0.5% or ±0.10mm 0.89, 1.0, 1.24, 1.65 ±12.5%
1/2” 12.7 ±0.5% or ±0.10mm 0.89, 1.0, 1.24, 1.65, 2.11 ±12.5%
3/4” 19.05 ±0.5% or ±0.10mm 1.24, 1.65, 2.11 ±12.5%
1” 25.4 ±0.5% or ±0.10mm 1.24, 1.65, 2.11 ±12.5%
1-1/4” 31.8 ±0.5% or ±0.10mm 1.24, 1.65, 2.11 ±12.5%
1-1/2” 38.1 ±0.5% or ±0.10mm 1.24, 1.65, 2.11 ±12.5%
2” 50.8 ±0.5% or ±0.10mm 1.65, 2.11, 2.77 ±12.5%
2-1/2” 63.5 ±0.5% or ±0.10mm 1.65, 2.11, 2.77 ±12.5%
3” 76.2 ±0.5% or ±0.10mm 1.65, 2.11, 2.77 ±12.5%
4” 101.6 ±0.75% 2.11, 2.77 ±12.5%
6” 152.4 ±0.75% 2.77 ±12.5%

Table2

OD mm OD tolerance mm WT mm WT tolerance mm Surface finishing
6.0 +0.10 0.89 +0.05 Ra≤0.10μm
Rmax≤0.30μm
10.0 +0.10 1.0 +0.05
12.0 +0.10 1.0 +0.10
-0.15
19.0 +0.10 1.5
23.0 ±0.10 1.5

Table3

Nominal pipe size OD mm 5S 10S Surface finishing
DN NB/NPS(inch)
8 1/4 13.8 1.20 1.65 Ra≤0.10μm

Rmax≤0.30μm
10 3/8 17.3 1.20 1.65
15 1/2 21.7 1.65 2.11
20 3/4 27.2 1.65 2.11
25 1 34.0 1.65 2.77
32 1 1/4 42.7 1.65 2.77
40 1 1/2 48.6 1.65 2.77
50 2 60.5 1.65 2.77
65 21/2 76.3 1.65 3.05
80 3 89.1 2.11 3.05
90 131/2 101.6 2.11 3.05

Features

  • ◎ HP / UHP Materials
  • TP316L EP tube are produced from special UHP raw material, low content of non-metal inclusion, gas, and P/S/C/Mn/Al/Ca, etc.
  • ◎ Chemically cleaned and Ultra High Purity (UHP) cleaned
  • EP tubes are chemically cleaned and passivated to keep nonvolatile residue levels to comply with ASTM G93 or SEMI E 49.6. The tubes are firstly rinsed by 18MΩ ultra-pure water, then flushed with 99.9995% high-purity nitrogen.
  • ◎ Traceability marking and clean packaging
  • Each tube is identified with manufacturer, material, size, heat number, heat treatment number, etc.
    EP tubes packing manner: the tubes are filled with nitrogen, both ends are wrapped with PA film, sealed with rubber tube caps, and packed by double-layer anti-electrostatic polyethylene bags in a class 10 clean room.
  • ◎ Quality assurance
  • Scanning Electron Microscope (SEM)
  • Energy Dispersive Spectroscopy (EDS),
  • Surface Roughness Gauge
  • Particle Counter
  • Dew-point meter
  • Hardness tester
  • Metallographic microscope
  • Tensile testing machine
  • ◎ Advanced ID surface finish level
  • The company has advanced surface treatment technology to ensure the internal surface finishing.